| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02598
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2013-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6036670-B2 |
| titleOfInvention |
Defect concentration evaluation method for silicon single crystal substrate |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160097200-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102029647-B1 |
| priorityDate |
2013-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |