http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5865916-B2

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-963
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3208
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
filingDate 2012-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-5865916-B2
titleOfInvention Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022006004-A1
priorityDate 2011-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23995
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460341
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453411115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217673
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449789534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523397
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559505
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452498775
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159367
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523852

Total number of triples: 53.