| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7833 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2013-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2015-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5706946-B2 |
| titleOfInvention |
Plasma etching method and plasma etching apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312102-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10515814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10192743-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10431470-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304688-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10446405-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018044713-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018044727-A1 |
| priorityDate |
2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |