http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5705495-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2010-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5705495-B2 |
| titleOfInvention | Plasma processing method and plasma processing apparatus |
| priorityDate | 2010-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.