http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5493165-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 |
| filingDate | 2009-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5493165-B2 |
| titleOfInvention | Manufacturing method of semiconductor device |
| priorityDate | 2009-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783 |
Total number of triples: 14.