http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5480415-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2427-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2203-326 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2301-312 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-245 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J11-06 |
| filingDate | 2013-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5480415-B1 |
| titleOfInvention | Adhesive tape for semiconductor wafer processing |
| abstract | Provided is an adhesive tape for processing a semiconductor wafer that satisfies required performance through a dicing process and a pick-up process of a semiconductor wafer that is becoming thinner, reduces chipping, and makes pick-up easy and reliable. An adhesive layer is provided on a base sheet, and a tip shape R = 5.0 ± 0.1 mm with respect to the thickness direction of the base sheet (that is, R = 4.9 to 5.1 mm). ) Indentation at 1 mm / min, and the stress relaxation time change from 0 to 5 seconds from the state of maintaining the displacement where the repulsive stress from the base sheet is 50 N (A) Is 0.23 to 0.28 N / s, and the ratio (B / A) to the stress relaxation time change (B) up to 5 to 10 seconds is 0.40 to 0.45. Adhesive tape. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015185692-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5697061-B1 |
| priorityDate | 2012-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 64.