http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5444228-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B33Y80-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2008-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5444228-B2 |
| titleOfInvention | Method for depositing thin film material on a substrate |
| priorityDate | 2007-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.