http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5296691-B2
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-32 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13439 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-2456 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0036 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 |
filingDate | 2008-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2013-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2013-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5296691-B2 |
titleOfInvention | Manufacturing method of conductor layer |
abstract | To provide a process capable of producing a titanium oxide electric conductor layer having excellent electric conductivity and good transparency, with high productivity. A first layer and a second layer each made of titanium oxide doped with a dopant such as Nb, are formed in order on a substrate in a state where the substrate is heated to prepare an electric conductor layer comprising an electric conductor layer. The first layer is formed under film formation conditions under which it is a layer containing polycrystals which contain no rutile crystals. The second layer is formed under film formation conditions under which a layer containing polycrystals which contain rutile crystals is obtained when directly formed on a substrate. |
priorityDate | 2007-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.