| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-006 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2005-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5296380-B2 |
| titleOfInvention |
Plasma processing step set adjustment method |
| priorityDate |
2004-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |