http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5283782-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G16C10-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G16C20-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2012-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5283782-B2 |
| titleOfInvention | Anion screening method |
| abstract | A method for screening for an anion according to the present invention is a method for selecting an anion that constitutes a PAG to be used for a chemically amplified resist. The method comprises: a structure optimization step of, with respect to a group of anions which can become components of PAGs, determining the most stable structure for a group of compounds each comprising each of the group of anions and an acid corresponding to the anion using the molecular orbital calculation on the group of compounds; a first calculation step of calculating the change in free energy (?G) in an acid dissociation reaction by performing the analysis of normal vibrations of a group of compounds having the most stable structure; a second calculation step of performing the absorption property assessment on the group of compounds having the most stable structure and calculating the absorption spectra of the group of compounds; and a step of selecting a compound which has a ?G value of 298 kcal/mol or less and of which each of the acid and the anion has a molar extinction coefficient (e) of 20000 L/(mol cm) or less at ? ± 10 nm wherein ? [nm] represents the wavelength at which the exposure to light is carried out, among from the group of compounds on the basis of the calculated results. This method enables the development of an anion molecule in a PAG with high efficiency. |
| priorityDate | 2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.