| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2240-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-473
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30 |
| filingDate |
2011-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5130413-B2 |
| titleOfInvention |
Surface treatment equipment |
| priorityDate |
2010-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |