http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5087271-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 |
filingDate | 2004-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5087271-B2 |
titleOfInvention | Plasma etching method using periodic modulation of gas chemical reaction |
priorityDate | 2003-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.