http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4614089-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2005-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-4614089-B2 |
titleOfInvention | Negative resist material and pattern forming method |
priorityDate | 2005-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 548.