Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 |
filingDate |
1999-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-4356962-B2 |
titleOfInvention |
Sidewall removal composition and sidewall removal method |
priorityDate |
1998-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |