http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4052623-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4052623-B2 |
| titleOfInvention | Manufacturing method of semiconductor device |
| priorityDate | 2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.