http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3487150-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate | 1997-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3487150-B2 |
| titleOfInvention | Dry etching method and apparatus |
| priorityDate | 1997-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.