http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2802263-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823814 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 |
| filingDate | 1996-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2802263-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| priorityDate | 1995-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.