http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2596348-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G1-00 |
| filingDate | 1993-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1997-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2596348-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| priorityDate | 1993-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.