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filingDate 2020-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2020187352-A
titleOfInvention A photoresist composition and a method of forming a resist pattern using this composition.
abstract PROBLEM TO BE SOLVED: To provide a new chemical composition which is transparent and has high sensitivity and may be suitable as a thick photoresist. SOLUTION: A polymer having a C 6-30 hydroxyaromatic group, a solvent, and a formula (I) A photoresist composition comprising a sulfonium salt having (in the formula, in formula (I), R, R 1 to R 8 , X, n, and R f are the same as those described herein). .. [Selection diagram] Fig. 1A-1C
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