http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020077882-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2020-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f8d0bf8fd842c6fee698a0c1ede3353 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f11137c73655e4098aafa681cbb4f039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec92357db5a2b75d9cd385c2361f4819 |
| publicationDate | 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020077882-A |
| titleOfInvention | Plasma processing device |
| abstract | PROBLEM TO BE SOLVED: To provide a plasma processing apparatus having a simple structure and high responsiveness. SOLUTION: A sample stage, which is disposed inside a vacuum vessel and whose inside can be decompressed, holds and holds a sample to be processed, and plasma forming means for forming plasma using the processing gas. A plasma processing apparatus for processing the sample using the plasma, comprising a metal base material that constitutes the sample base and is grounded, and a predetermined pressure larger than the inside of the processing chamber in the base material. An array for temperature control connected to the base material inside a closed space, each of which has a plurality of elements connected in series having a function of generating heat and cooling according to supplied electric power. At least one temperature control array and a switcher that switches the polarity of the electric power supplied to the temperature control array to switch the heat generation and cooling functions of the plurality of elements. [Selection diagram] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114709295-A |
| priorityDate | 2020-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.