http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020074423-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2020-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a040a6c042a888d95c95dd46428fc932 |
| publicationDate | 2020-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020074423-A |
| titleOfInvention | Electrostatic chuck assembly for high temperature processing |
| abstract | PROBLEM TO BE SOLVED: To provide an electrostatic chuck usable for high temperature processing. In a semiconductor processing chamber, an electrostatic chuck assembly includes a pack and a cooling plate. The puck 166 includes an electrically insulative upper pack plate that includes one or more heating elements 176 and one or more electrodes 180 for electrostatically fixing the substrate 144 and is bonded to the upper pack plate by a metal bond. The lower pack plate further includes a plurality of structures distributed on the bottom surface of the lower pack plate at different distances from the center of the lower pack plate. Each of the plurality of structures houses one of the plurality of fasteners. The cooling plate is coupled to the pack by a plurality of fasteners, each fastener applying substantially equal fastening force to couple the cooling plate 164 to the pack 166. [Selection diagram] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112021002380-T5 |
| priorityDate | 2014-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.