http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020007177-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d3d6ffd8187147dbd854f5e70a99a88 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B32-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00 |
| filingDate | 2018-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa06faa285c7a0a56d122b8662d91930 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abfe8c34a4a3a0d52c8fa8f6d5565713 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7edc4f6d893d547c02acec8dd367c8ae |
| publicationDate | 2020-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020007177-A |
| titleOfInvention | How to grow carbon nanotubes |
| abstract | PROBLEM TO BE SOLVED: To provide a method for growing carbon nanotubes at a desired position on a substrate with high accuracy. SOLUTION: The method of growing carbon nanotubes on a substrate according to the present invention comprises the steps of: supplying a silica precursor on the substrate; and irradiating the focused ion beam (FIB) to the substrate supplied with the silica precursor. Forming a sheet of silica based on the precursor and having a thickness greater than 3 nm on the FIB-irradiated substrate; and heat treating the substrate on which the sheet has been formed in an atmosphere containing at least oxygen. Growing carbon nanotubes on the heat-treated substrate by chemical vapor deposition (CVD). [Selection diagram] Fig. 1 |
| priorityDate | 2018-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.