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filingDate 2016-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2019-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2019504509-A
titleOfInvention Precursor composition containing organic group 4 compound and method for forming thin film using the same
abstract The precursor composition according to an embodiment of the present invention includes a mixture of any one compound selected from an organoaluminum compound, an organogallium compound, and an organogermanium compound and an organic group 4 compound.
priorityDate 2015-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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