http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019220500-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58054227722081749d7e8e121924a5c8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2018-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bbf9467396cf8d95f2e88da9449d7ff |
| publicationDate | 2019-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019220500-A |
| titleOfInvention | Regeneration apparatus and regeneration method for plasma processing apparatus |
| abstract | An object of the present invention is to provide a reproducing apparatus of a plasma processing apparatus which can easily regenerate components of the plasma processing apparatus. According to one embodiment, a reproducing apparatus of a plasma processing apparatus includes a coating unit, a solidifying unit, and a control unit. The application unit applies a regenerating liquid to a consumable part of a component configuring the plasma processing apparatus. The solidifying unit solidifies the regenerating liquid applied to the component. The controller controls application of the regenerating liquid to the consumable part of the component by the application unit. [Selection diagram] FIG. |
| priorityDate | 2018-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.