http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019201168-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_30208fce9ca36e03cb3cb8a1259170bc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2018-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed08aa73124b4d27b3d9cd69bfe15d53 |
| publicationDate | 2019-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019201168-A |
| titleOfInvention | Local dry etching equipment |
| abstract | In a local dry etching apparatus, a local dry etching process can be performed by correcting the etching rate so as to be kept constant based on the pressure of the plasma generation unit, the accumulated use time, and the elapsed start time, resulting in a processing error. To reduce. In the local dry etching apparatus, a pressure gauge 61 is provided in the vicinity of the plasma generating part 21 of the discharge tube 2 and upstream thereof in order to detect the pressure of the plasma generating part 21. The etching rate calculator 62 is a function obtained in advance, and based on the etching rate function 63 representing the correspondence between the pressure of the plasma generation unit 21 and the etching rate, the etching rate is calculated from the measured value of the pressure gauge 61. Further, the correction is made according to the accumulated use time of the discharge tube and the elapsed start time. The electromagnetic wave output control device 66 controls the output of the electromagnetic wave transmitter 10 based on the calculated value of the etching rate calculator 62 so that the etching rate becomes constant. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022254677-A1 |
| priorityDate | 2018-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.