| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02A30-27 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2018-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e9f93e738b0d27bc050c479712bc03e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4df1da9cb40f94b14e5c0c4e1ecb29e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_767c1366a95a20870ca97e032cdeaa04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a7b4b127c364c1ef80ed369aec16099
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7d75ff3be77bfad37edab3f897c3462 |
| publicationDate |
2019-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019186306-A |
| titleOfInvention |
Boron-based film forming method and film forming apparatus |
| abstract |
A method and apparatus for forming a boron-based film capable of forming a boron-based film with good adhesion are provided. A boron-based film forming method for forming a boron-based film mainly containing boron on a substrate includes a first step of forming an initial boron-based film on the substrate by CVD, and then the film is formed. The initial boron-based film is subjected to plasma treatment, the substrate surface reacts with the initial boron-based film to form an interfacial adhesion layer, and then the main boron-based film is formed on the interfacial adhesion layer by CVD. A third step. [Selection] Figure 1 |
| priorityDate |
2018-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |