| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74973199515dbabd2310245aab03e282 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B7-226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28B17-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28B11-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C19-008 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C24-04 |
| filingDate |
2018-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90302b576513a4eea962c6ab64012df2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fb70b56ad9ceff6bd6372b35cd3ea6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22e2ac5614a37bceb34bd9ac8b0e99ae |
| publicationDate |
2019-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019094565-A |
| titleOfInvention |
Film forming apparatus and film forming method |
| abstract |
The present invention provides a film forming apparatus and a film forming method capable of improving the quality of a film while suppressing aggregation of a raw material ceramic powder. A mixing unit (11) for producing a mixed ceramic powder P3 in which a material containing an organic compound imparting lubricity to the raw material ceramic powder P1 is mixed as an additive material P2 with a raw material ceramic powder P1 having an average particle diameter of 10 μm or less. And the injection device 20 for injecting the mixed ceramic powder P3 toward the surface of the base material B, and the mixed ceramic powder P3 heated from the mixed ceramic powder P3 injected from the injection device 20 and contained in the mixed ceramic powder P3. And a heating device 30 for evaporating the organic compound of the additive material P2. [Selected figure] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112439657-A |
| priorityDate |
2017-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |