| abstract |
To provide an adsorptively fixed sheet having sufficient shear adhesion in the same direction as the surface, weak adhesion in the direction perpendicular to the surface, and excellent antistatic performance. The adsorption temporary fixing sheet of the present invention is an adsorption temporary fixing sheet having a foam layer having an open cell structure, and has a surface resistivity of 1.0 × 10 4 Ω / □ to 1.0 × 10 10. Ω / □, and the silicon chip vertical adhesion after 18 hours at −30 ° C. on the surface of the foam layer is V1 (N / 1 cm □), and the silicon chip vertical adhesion after 18 hours at 23 ° C. N / 1 cm □), the silicon chip vertical adhesion after 18 hours at 80 ° C. is V3 (N / 1 cm □), and the silicon chip shear adhesion after 18 hours at −30 ° C. of the surface of the foam layer is H1 The silicon chip shear adhesion after 18 hours at 23 ° C was H2 (N / 1cm □), and the silicon chip shear adhesion after 18 hours at 80 ° C was H3 (N / 1cm □) When V1 <H1, V2 <H2, V3 <H3 A. 【Selection chart】 None |