http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019036637-A

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-02
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02
filingDate 2017-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8719ce2bcc0051f156c349b5c0dab002
publicationDate 2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2019036637-A
titleOfInvention Airtight package manufacturing method and airtight package
abstract Provided is a method capable of effectively ensuring hermetic reliability and laser sealing strength even when a ceramic substrate or the like is used as a package substrate. A method for manufacturing an airtight package according to the present invention includes preparing a glass lid, forming a first sealing material layer on the glass lid, preparing a package base, and forming a first on the package base. A step of forming a second sealing material layer, a step of laminating and arranging the glass lid and the package base so that the first sealing material layer and the second sealing material layer are in contact, and a laser from the glass lid side By irradiating light, the first sealing material layer and the second sealing material layer are softened and deformed to hermetically seal the first sealing material layer and the second sealing material layer. And a step of obtaining a package, wherein the average width of the second sealing material layer is made larger than the average width of the first sealing material layer, and the irradiation diameter of the laser beam is set to be larger than that of the second sealing material layer. It is characterized by being made smaller than the average width. [Selection] Figure 1
priorityDate 2017-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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