http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019034930-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D233-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 |
| filingDate | 2018-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019034930-A |
| titleOfInvention | Compound, resist composition and method for producing resist pattern |
| abstract | An object of the present invention is to provide a compound and a resist composition capable of producing a thick film resist pattern with an excellent focus margin. A compound represented by formula (I) and a resist composition containing the compound [Wherein, L 1 and L 2 each represent a single bond or a divalent hydrocarbon group, and —CH 2 — contained in the divalent hydrocarbon group is —O—, —S—, —S (O) 2 -etc. may be substituted. W 1 represents a hydrocarbon ring, and —CH 2 — contained in the hydrocarbon ring may be replaced by —O—, —S—, —S (O) 2 — and the like. n represents an integer of 1 to 3; X 1 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. R 1 is a fluorinated hydrocarbon group etc.] 【Selection chart】 None |
| priorityDate | 2017-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 235.