| abstract |
A method for forming a glass substrate includes providing a glass substrate containing alumina, translating a pulsed laser beam on the glass substrate to form one or more pilot holes, and etching the glass substrate. And a step of swinging. The etching solution has a pH of about 0 to about 2.0, and the etching rate is less than about 3 μm / min. A glass substrate having a first surface, a second surface opposite to the first surface in the thickness direction, and at least one hole penetrating the first surface, the at least one hole being an etching solution A glass substrate that is etched by is disclosed. (1) a first plane in contact with the first surface in a region having no deviated portion in the thickness of the substrate around the at least one hole or the at least one hole; and (2) recessed from the first plane. However, the maximum distance d1 between the surface of the displacement portion is about 0.2 μm or less. |