http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018159789-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_142427a0ef2d8d40c02a31e62b310e8e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34c048bfb60bc26bcc422879e1bccd02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df899713455e8af99dc2d2b739499fc8 |
| publicationDate | 2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018159789-A |
| titleOfInvention | Silicon-containing film forming composition for resist process, silicon-containing film and pattern forming method |
| abstract | The present invention provides a silicon-containing film forming composition for a resist process capable of forming a silicon-containing film having excellent solvent resistance and oxygen-based gas etching resistance. A silicon-containing film forming composition for a resist process, comprising a polysiloxane having a first structural unit represented by the following formula (1) and a solvent. In the following formula (1), Y + is a monovalent onium cation. a is an integer of 1 to 3. When a is 2 or more, the plurality of Y + s may be the same or different. R 1 is a monovalent organic group having 1 to 20 carbon atoms, a hydrogen atom, or a hydroxy group. b is an integer of 0-2. When b is 2, two R 1 may be the same or different. However, a + b is 3 or less. The onium cation is preferably an ammonium cation. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220155319-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022114134-A1 |
| priorityDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 114.