http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018135507-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-26 |
| filingDate | 2018-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5783c924eb99533d01f0b89dc260e78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2018-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018135507-A |
| titleOfInvention | Polymerizable monomer, resin, resist composition, and method for producing resist pattern |
| abstract | An object of the present invention is to provide a polymerizable monomer, a resin, and a resist composition capable of producing a resist pattern with good CD uniformity (CDU). A polymerizable monomer having a group represented by the formula (aa1). [Wherein, X a and X b each independently represents an oxygen atom or a sulfur atom. Ring W 1 represents an alicyclic hydrocarbon group, and the hydrogen atom contained in the alicyclic hydrocarbon group is a hydroxy group, an alkyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, It may be substituted with an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a combination thereof. L 1 represents a hydrocarbon group which may have a substituent. R 1 represents a hydrogen atom or a hydrocarbon group, and —CH 2 — contained in the hydrocarbon group may be replaced by —O—, —S—, —CO— or —S (O) 2 —. Good. * Represents a bond. ] [Selection figure] None |
| priorityDate | 2017-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 247.