http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018135323-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D493-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D493-10 |
filingDate | 2018-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 |
publicationDate | 2018-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2018135323-A |
titleOfInvention | Carboxylate, carboxylic acid generator, resist composition and method for producing resist pattern |
abstract | An object of the present invention is to provide a salt and a resist composition capable of producing a resist pattern with good CD uniformity (CDU). A carboxylate represented by the formula (I), an acid generator containing the salt, and a resist composition. [Wherein, X a and X b each independently represents an oxygen atom or a sulfur atom. Ring W represents a heterocyclic ring containing an ester bond or a thioester bond in the ring structure, and —CH 2 — contained in the heterocyclic ring is replaced by —O—, —S—, —CO— or the like. In addition, the hydrogen atom contained in the heterocyclic ring may be substituted with a hydroxy group, a cyano group, a carboxy group, an alkyl group, an alkoxy group, an alkoxycarbonyl group, or a combination thereof. X 1 represents a hydrocarbon group which may have a substituent, and —CH 2 — contained in the hydrocarbon group may be replaced by —O—, —S—, —CO— or the like. Z + represents an organic cation. ] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018024642-A |
priorityDate | 2017-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 226.