http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018135321-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D317-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2018-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04d3730b6ad527289e0c18d5b14850d2 |
| publicationDate | 2018-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018135321-A |
| titleOfInvention | Salt, acid generator, resist composition, and method for producing resist pattern |
| abstract | An object of the present invention is to provide a salt and a resist composition capable of producing a resist pattern with a good mask error factor (MEF). A salt having a group represented by the formula (aa1). [Wherein, X a and X b each represents an oxygen atom or a sulfur atom. Ring W 1 represents an alicyclic hydrocarbon group having 3 to 36 carbon atoms, and the hydrogen atom contained in the alicyclic hydrocarbon group is a hydroxy group, an alkyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group. A group, an alkylcarbonyloxy group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group or a combination thereof may be substituted. L 1 represents a C 1-12 hydrocarbon group which may have a substituent. R 1 represents a hydrogen atom or a hydrocarbon group having 1 to 18 carbon atoms, and —CH 2 — contained in the hydrocarbon group is —O—, —S—, —CO—, or —S (O) 2. -May be substituted. [Selection figure] None |
| priorityDate | 2017-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 221.