http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018062533-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06 |
| filingDate | 2018-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f7df5dca00e4b4f6b8015ce50aa19ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14f87cd55c3b72d5ceb3f3a479800cea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec1251d19b8212592450a23389f44c77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a384b0dd8bc9e7c236ae673d124a708 |
| publicationDate | 2018-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018062533-A |
| titleOfInvention | Alkoxide compounds |
| abstract | Disclosed is an alkoxide compound which is not pyrophoric and has high thermal stability and is useful as a raw material for forming a thin film in an ALD method. An alkoxide compound represented by the following general formula (I): Wherein R1 to R3 each independently represents hydrogen or an alkyl group having 1 to 5 carbon atoms. R4 represents an alkyl group having 1 to 5 carbon atoms. M is a metal atom or a silicon atom. N represents an integer of 1 or more, m represents an integer of 0 or more, and n + m represents a valence of a metal atom or a silicon atom. |
| priorityDate | 2018-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 289.