http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006249046-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 |
| filingDate | 2005-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c15e5aa9f158e4a564aabeff10ef9e4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a384b0dd8bc9e7c236ae673d124a708 |
| publicationDate | 2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006249046-A |
| titleOfInvention | Silicon alkoxide compound, raw material for thin film formation, and method for producing thin film |
| abstract | Vaporization such as CVD method or ALD method has high vapor pressure, can form a film at low temperature, is chemically stable at room temperature and normal pressure, and has excellent storage stability and mixing stability with other sources. To provide a silicon compound particularly suitable as a precursor for a thin film production method having a process. A silicon alkoxide compound represented by the following general formula (I): [Chemical 1] (In the formula, R represents an alkyl group having 1 to 4 carbon atoms, R 1 to R 4 represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and A represents an alkanediyl having 1 to 4 carbon atoms. Represents a group, and n represents a number of 1 to 3.) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011173261-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9896468-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014077089-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014077089-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10155784-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018062533-A |
| priorityDate | 2005-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 262.