http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017538285-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2015-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017538285-A |
| titleOfInvention | Cobalt polishing accelerator |
| abstract | The present invention is a cobalt promoter selected from (a) abrasive particles and (b) a compound having the following formula NR 1 R 2 R 3 , wherein R 1 , R 2 , and R 3 are: , Hydrogen, carboxyalkyl, substituted carboxyalkyl, hydroxyalkyl, substituted hydroxyalkyl, and aminocarbonylalkyl, each of R 1 , R 2 , and R 3 is hydrogen; A heterocyclylalkyl-α-amino acid; an N- (amidoalkyl) amino acid; an unsubstituted heterocycle; an alkyl-substituted heterocycle; a substituted alkyl-substituted heterocycle; an N-aminoalkyl-α-amino acid; or R 1, R 2, and one of R 3, hydrogen; dicarboxy heterocycle; heterocyclylalkyl -α- amino; N-( (Imidoalkyl) amino acid; unsubstituted heterocycle; alkyl substituted heterocycle; substituted alkyl-substituted heterocycle; N-aminoalkyl-α-amino acid; and combinations thereof; and (c) a cobalt corrosion inhibitor And (d) an oxidizing agent that oxidizes the metal, and (e) water, and provides a chemical mechanical polishing composition having a pH of about 3 to about 8.5. The present invention further provides a method of chemically mechanically polishing a substrate using the chemical mechanical polishing composition of the present invention. Typically, the substrate contains cobalt. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019501511-A |
| priorityDate | 2014-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.