http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017125093-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J11-06 |
| filingDate | 2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_919854ea9f615a8b675e5e5b6ac4ab66 |
| publicationDate | 2017-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017125093-A |
| titleOfInvention | Semiconductor protective tape and wafer processing method |
| abstract | A semiconductor protective tape and a wafer processing method capable of maintaining sufficient wafer protection performance even when high-temperature processing is performed on a wafer having irregularities on the surface, and capable of being peeled off from the wafer without any adhesive residue after processing. A photocurable pressure-sensitive adhesive layer 12 containing a photopolymerization initiator having a longest wavelength of 380 nm or more at which the absorbance of the photopolymerization initiator is 0.1 or more and a substrate layer 11 made of polyethylene naphthalate are provided. A wafer processing method using a semiconductor protective tape. The absorbance measurement conditions are an initiator concentration of 0.01% by weight (acetonitrile solution), a cell length of 10 mm (quartz cell), and a wavelength of 200 nm to 800 nm. A wafer processing method including an attaching step of attaching the semiconductor protective tape to a surface of the wafer having a concave and convex portion formed on the surface thereof in a state where the bottom portion of the concave portion is not in contact with the surface. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111868887-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I753328-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7132702-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109683377-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020241407-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109683377-A |
| priorityDate | 2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.