http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017110268-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_874caee9b60994beaa14b313874793da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6bb204e35baf7ee6695aa8e7304a066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33e089881ea9874599e16fe6c4fd9656 |
| publicationDate | 2017-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017110268-A |
| titleOfInvention | Raw material for producing aluminum oxide film and method for producing aluminum oxide film |
| abstract | PROBLEM TO BE SOLVED: To provide an aluminum oxide film production raw material capable of producing a high-quality aluminum oxide film and an aluminum oxide film production method using the raw material. The present invention is solved by an aluminum oxide film manufacturing raw material containing an aluminum compound represented by the following formula (1). The present invention also provides an aluminum oxide film manufacturing method in which an aluminum compound represented by the following formula (1) is supplied onto a film formation target heated to 300 to 500 ° C. to form an aluminum oxide film. Solved. (In the formula, R 1 represents a linear alkyl group having 1 to 2 carbon atoms. R 2 to R 4 represent a linear alkyl group having 1 to 8 carbon atoms, and may be the same or different. Is also good.) [Selection figure] None |
| priorityDate | 2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 118.