http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017072830-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28 |
| filingDate | 2016-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2017-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017072830-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | An object of the present invention is to provide a resist composition that can produce a resist pattern having no watermark and good line edge roughness. A resist composition containing a resin (X) having a structural unit derived from a compound represented by formula (I), a resin (A) having a structural unit having an acid labile group, and an acid generator. [Wherein, R 1 represents an alkyl group which may have a halogen atom, a hydrogen atom, etc .; R 2 represents a fluorinated hydrocarbon group or a group represented by the formula (t), and A t46 and A t47 each represent fluorine atom aliphatic which may have a hydrocarbon group, X t44 represents a carbonyl group or an oxycarbonyl group, at least one of a t46 and a t47 has one or more fluorine atoms. * Is a bond with a carbonyl group; R 3 and R 4 are each an alkyl group; A 1 and A 2 are each an alkanediyl group, and the carbon atom at the bonding position with the oxygen atom is not a tertiary carbon atom. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020105523-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7239611-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020105523-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017151474-A |
| priorityDate | 2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 277.