http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017045037-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2016-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0578340d8eda8655050b54e7ae628333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5fdf765c2378e2dd139c2825ad992c3 |
| publicationDate | 2017-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017045037-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | An object of the present invention is to provide a resist composition capable of producing a resist pattern with good CD uniformity (CDU) without generating a residue. A -SO 2 - structural unit having a group, the resin (A1) containing a structural unit having the structural unit and acid labile group represented by the formula (a4-0), containing the acid generator Resist composition. [In formula (a4-0), R 5 represents a hydrogen atom or a methyl group. L 5 represents a single bond or an aliphatic saturated hydrocarbon group having 1 to 4 carbon atoms. L 3 represents a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 8 carbon atoms. R 6 represents a hydrogen atom or a fluorine atom. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018194123-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018194123-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I763827-B |
| priorityDate | 2015-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 259.