http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017041512-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2015-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9814e6d1f7530123463aa481baf639f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3da976d3115538d2d0a3ef95d73a82aa |
| publicationDate | 2017-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017041512-A |
| titleOfInvention | Substrate processing method and substrate processing apparatus |
| abstract | A substrate processing method and a substrate processing method that can completely replace a processing liquid on the surface of a substrate with a low surface tension liquid in a short time, whereby the surface of the substrate can be dried in a short time while suppressing collapse of the pattern. Providing equipment. A substrate processing apparatus includes a spin chuck, a water supply unit that supplies water to an upper surface of a substrate held by the spin chuck, and an EG formed on the upper surface of the substrate held by the spin chuck. An EG supply unit 8 for supplying (ethylene glycol) and a hot plate 9 for heating a liquid film of the mixed liquid formed on the upper surface of the substrate W from below through the substrate W are included. By supplying EG to the liquid film of water on the substrate W, a liquid film of the mixed liquid is formed on the upper surface of the substrate W. When the liquid film of the mixed liquid is heated by the hot plate 9, the water in the liquid film of the mixed liquid evaporates, and the water in the liquid film of the mixed liquid is completely replaced with EG. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020035986-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11524314-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7122911-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020044885-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018026402-A |
| priorityDate | 2015-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.