http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016146437-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2015-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20a442f4f735161a071c7a9f7ae0f902 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e8d7505b4a15ad42b4628684eb7fb64 |
| publicationDate | 2016-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016146437-A |
| titleOfInvention | Wafer processing method |
| abstract | A wafer processing method in which a wafer is ground while being reinforced with an adhesive tape, and the adhesive tape reliably follows the unevenness and exhibits sufficient adhesive force even for a wafer having unevenness on the surface. And the processing method of the wafer which does not generate | occur | produce a curvature in the thin film wafer after grinding is provided. Adhesive tape affixing an adhesive tape having a curable resin layer containing a curable component that crosslinks and cures at least by light irradiation or heating and an adhesive layer from the adhesive layer side for reinforcement. A curable resin layer curing step for irradiating or heating the pressure-sensitive adhesive tape to crosslink and cure the curing component, a grinding step for grinding the wafer reinforced by the pressure-sensitive adhesive tape into a thin film, and the grinding A wafer processing method comprising: an adhesive tape peeling step of peeling the adhesive tape from a subsequent wafer. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017191815-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017191815-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019054123-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019181732-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019181731-A1 |
| priorityDate | 2015-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.