http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016092006-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H3-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2015-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b550d690be9c147f6018735faf59ff8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0726efc17902544aceecb2fa3e6f271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c7a4901428d0c92efa76d0b9e575770 |
| publicationDate | 2016-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016092006-A |
| titleOfInvention | Method and apparatus for providing an anisotropic monochromatic neutral beam with a non-dipolar electron plasma |
| abstract | A method and apparatus for providing an anisotropic monochromatic neutral beam with a non-dipolar electron plasma that overcomes trade-offs between etch efficiency, microloading, charge damage, TMP flow rate, and / or these parameters. . An NB-NEP apparatus 50 generates a first plasma dielectric tube / chamber 58 that generates a first plasma at a first plasma potential, and generates a second plasma at a second plasma potential that is higher than the first plasma potential. A second plasma dielectric tube / chamber 64 is included. The second plasma is generated by using an electron flux from the first plasma. Furthermore, it has a dielectric (insulator) neutralizer grid 72 that is not grounded. The neutralizer grid 72 is configured to expose a substantially anisotropic neutral beam traveling from the neutralizer grid 72 to the substrate in the second plasma dielectric tube / chamber 64. [Selection] Figure 3 |
| priorityDate | 2014-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.