| abstract |
An object of the present invention is to prevent as much as possible the peeling of the electrode and the reduction in the film thickness due to the step of forming the electrode on the piezoelectric film. An ink jet head includes a flow path forming portion in which a pressure chamber communicated with a nozzle is formed, a vibration film provided in the flow path forming portion so as to cover the pressure chamber, and a pressure chamber. Corresponding to the piezoelectric film 32 disposed on the vibration film 30, the common electrode 31 disposed on the surface of the piezoelectric film 32 on the vibration film 30 side, and the surface of the piezoelectric film 32 opposite to the vibration film 30. Individual electrodes 33 and wirings 35 connected to the individual electrodes 33. In manufacturing the ink jet head, the wiring 35 is formed so that a part of the wiring 35 covers the piezoelectric film 32, and thereafter, the wiring 35 is electrically connected to the surface of the piezoelectric film 32 opposite to the vibration film 30. Thus, the individual electrode 33 is formed. [Selection] Figure 4 |