http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016039355-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_985f1bf0df4204078e687f8417dc5871 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2014-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2795f9d19675feaffc14fe419178e64c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_952f071d8047f2877ec20acbbe226313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8887e91d604b748930cf65d2d199d63 |
| publicationDate | 2016-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016039355-A |
| titleOfInvention | Substrate processing apparatus and substrate processing method |
| abstract | A substrate processing apparatus and a substrate processing method for efficiently processing a substrate are provided. A substrate processing method according to an embodiment of the present invention includes providing a substrate on which an oxide layer is formed, and treating the oxide layer with a first process gas in a plasma state to replace the byproduct layer. The substrate is heated to a temperature that is equal to or higher than a first heating temperature that is a temperature at which the by-product layer is decomposed and that is equal to or higher than a second heating temperature that is a boiling point of an additional by-product that is generated in the process of decomposing the by-product layer Heating the substrate to remove the byproduct layer from the substrate. [Selection] Figure 3 |
| priorityDate | 2014-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.