| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32681f1832d227fe8df23d12a37f67a8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2111-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-781
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C24-04 |
| filingDate |
2015-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8cee38675af9362cc6d8434d9ed7d41 |
| publicationDate |
2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016027624-A |
| titleOfInvention |
Plasma-resistant member and manufacturing method thereof |
| abstract |
An object of the present invention is to provide a plasma-resistant member capable of reducing particles and stably maintaining a chamber condition. A yttria polycrystal comprising a base material and a layered structure having a plasma resistance including a yttria polycrystal formed on the surface of the base material by an aerosol deposition method. The body has a crystal structure in which a cubic crystal and a monoclinic crystal are mixed, and the ratio of the monoclinic crystal to the cubic crystal in the yttria polycrystal constituting the layered structure is 0% or more and 60% or less. And a crystallite size of the yttria polycrystal constituting the layered structure is 8 nm or more and 50 nm or less. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190122540-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017109975-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017114724-A |
| priorityDate |
2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |