http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015217566-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2014-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3013e2b7cd1af4620bdb275103f57d3e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dacf64c8c75c97980faa28656244e38 |
| publicationDate | 2015-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015217566-A |
| titleOfInvention | LAMINATE MANUFACTURING METHOD AND LAMINATE |
| abstract | A method of manufacturing a laminate including a separation layer that achieves strong adhesion between a substrate and a support, and is excellent in separation performance when separating the support from the substrate, cleanability after separation, and the like. And providing a laminate. A method of manufacturing a laminate in which a substrate 1, an adhesive layer 2, a separation layer 3 that is altered by absorbing light, and a light-transmissive support 4 are laminated in this order. And a separation layer forming step for forming the separation layer. In the separation layer formation step, a plurality of reaction gases are sequentially introduced into a processing chamber for performing plasma treatment to continuously form the separation layer on the support. . [Selection] Figure 1 |
| priorityDate | 2014-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 183.