http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015113318-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-66 |
| filingDate | 2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0106502b1821cd02a499d92f680621ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2015-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015113318-A |
| titleOfInvention | Salt, resist composition and method for producing resist pattern |
| abstract | There is provided a resist composition containing a salt capable of producing a resist pattern having good pattern collapse resistance (PCM). A salt represented by the formula (I) [in the formula (I), Q 1 and Q 2 each independently represents a fluorine atom or a C 1-6 perfluoroalkyl group. Lb1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms. W represents a hydrocarbon ring having 5 to 18 carbon atoms. R1 represents a C1-C10 alkyl group, a phenyl group or a C1-C10 alkylphenyl group which may have a halogen atom. R2 represents an alkyl group having 1 to 10 carbon atoms, a halogen atom or a hydroxy group. m represents an integer of 1 to 3. n represents an integer of 0 to 10. When n is 2 or more, the plurality of R3 may be the same or different. l represents an integer of 0 to 4. Z + represents an organic sulfonium cation or an organic iodonium cation. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170128131-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017207740-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017207739-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102377389-B1 |
| priorityDate | 2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 223.